3/5/2011	10:57:42 AM	Bypass valve closed
3/5/2011	10:57:43 AM	Main Vac valve closed
3/5/2011	10:58:05 AM	SiCl4 post valve opened
3/5/2011	10:58:06 AM	SiCl4 post valve closed
3/5/2011	10:58:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2011	10:58:23 AM	Recipe started at 10:58 AM
3/5/2011	10:58:23 AM	H2 valve closed
3/5/2011	10:58:23 AM	BCl3 valve closed
3/5/2011	10:58:23 AM	PH3 valve closed
3/5/2011	10:58:23 AM	SiCl4 pre valve closed
3/5/2011	10:58:23 AM	SiCl4 post valve closed
3/5/2011	10:58:23 AM	Main Vac valve closed
3/5/2011	10:58:23 AM	Bypass valve closed
3/5/2011	10:58:23 AM	Bubbler valve closed
3/5/2011	10:58:23 AM	Helium valve opened
3/5/2011	10:58:23 AM	Helium MFC set to  500.000000
3/5/2011	10:58:23 AM	H2 MFC set to  0.000000
3/5/2011	10:58:23 AM	BCl3 MFC set to  0.000000
3/5/2011	10:58:23 AM	PHl3 MFC set to  0.000000
3/5/2011	10:58:23 AM	SiCl4 MFC set to  0.000000
3/5/2011	10:58:23 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	10:58:23 AM	Tube furnace set to 0
3/5/2011	10:59:41 AM	Helium valve closed
3/5/2011	10:59:41 AM	H2 valve closed
3/5/2011	10:59:41 AM	BCl3 valve closed
3/5/2011	10:59:41 AM	PH3 valve closed
3/5/2011	10:59:41 AM	SiCl4 pre valve closed
3/5/2011	10:59:41 AM	SiCl4 post valve closed
3/5/2011	10:59:41 AM	Main Vac valve closed
3/5/2011	10:59:41 AM	Bypass valve closed
3/5/2011	10:59:41 AM	Bubbler valve closed
3/5/2011	10:59:41 AM	Helium MFC set to  0.000000
3/5/2011	10:59:41 AM	H2 MFC set to  0.000000
3/5/2011	10:59:41 AM	BCl3 MFC set to  0.000000
3/5/2011	10:59:41 AM	PHl3 MFC set to  0.000000
3/5/2011	10:59:41 AM	SiCl4 MFC set to  0.000000
3/5/2011	10:59:41 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	10:59:42 AM	Tube furnace set to 0
3/5/2011	10:59:42 AM	Run finished at 10:59 AM
3/5/2011	10:59:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2011	10:59:58 AM	SiCl4 post valve opened
3/5/2011	11:00:00 AM	SiCl4 post valve closed
3/5/2011	11:00:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2011	11:00:04 AM	Recipe started at 11:00 AM
3/5/2011	11:00:04 AM	H2 valve closed
3/5/2011	11:00:04 AM	BCl3 valve closed
3/5/2011	11:00:04 AM	PH3 valve closed
3/5/2011	11:00:04 AM	SiCl4 pre valve closed
3/5/2011	11:00:04 AM	SiCl4 post valve closed
3/5/2011	11:00:04 AM	Main Vac valve closed
3/5/2011	11:00:04 AM	Bypass valve closed
3/5/2011	11:00:04 AM	Bubbler valve closed
3/5/2011	11:00:04 AM	Helium valve opened
3/5/2011	11:00:04 AM	Helium MFC set to  500.000000
3/5/2011	11:00:04 AM	H2 MFC set to  0.000000
3/5/2011	11:00:04 AM	BCl3 MFC set to  0.000000
3/5/2011	11:00:04 AM	PHl3 MFC set to  0.000000
3/5/2011	11:00:04 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:00:04 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:00:04 AM	Tube furnace set to 0
3/5/2011	11:00:04 AM	Helium valve closed
3/5/2011	11:00:04 AM	H2 valve closed
3/5/2011	11:00:04 AM	BCl3 valve closed
3/5/2011	11:00:04 AM	PH3 valve closed
3/5/2011	11:00:04 AM	SiCl4 pre valve closed
3/5/2011	11:00:04 AM	SiCl4 post valve closed
3/5/2011	11:00:04 AM	Main Vac valve closed
3/5/2011	11:00:04 AM	Bypass valve closed
3/5/2011	11:00:04 AM	Bubbler valve closed
3/5/2011	11:00:04 AM	Helium MFC set to  0.000000
3/5/2011	11:00:04 AM	H2 MFC set to  0.000000
3/5/2011	11:00:04 AM	BCl3 MFC set to  0.000000
3/5/2011	11:00:04 AM	PHl3 MFC set to  0.000000
3/5/2011	11:00:04 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:00:04 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:00:04 AM	Tube furnace set to 0
3/5/2011	11:00:05 AM	Run finished at 11:00 AM
3/5/2011	11:00:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2011	11:00:06 AM	SiCl4 post valve opened
3/5/2011	11:00:08 AM	SiCl4 post valve closed
3/5/2011	11:00:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2011	11:00:10 AM	Recipe started at 11:00 AM
3/5/2011	11:00:10 AM	Helium valve closed
3/5/2011	11:00:10 AM	H2 valve closed
3/5/2011	11:00:10 AM	BCl3 valve closed
3/5/2011	11:00:10 AM	PH3 valve closed
3/5/2011	11:00:10 AM	SiCl4 pre valve closed
3/5/2011	11:00:10 AM	SiCl4 post valve closed
3/5/2011	11:00:10 AM	Main Vac valve closed
3/5/2011	11:00:10 AM	Bubbler valve closed
3/5/2011	11:00:10 AM	Bypass valve opened
3/5/2011	11:00:10 AM	Helium MFC set to  0.000000
3/5/2011	11:00:10 AM	H2 MFC set to  0.000000
3/5/2011	11:00:10 AM	BCl3 MFC set to  0.000000
3/5/2011	11:00:10 AM	PHl3 MFC set to  0.000000
3/5/2011	11:00:10 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:00:10 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:00:11 AM	Tube furnace set to 0
3/5/2011	11:00:34 AM	Helium valve closed
3/5/2011	11:00:34 AM	H2 valve closed
3/5/2011	11:00:34 AM	BCl3 valve closed
3/5/2011	11:00:34 AM	PH3 valve closed
3/5/2011	11:00:34 AM	SiCl4 pre valve closed
3/5/2011	11:00:34 AM	SiCl4 post valve closed
3/5/2011	11:00:34 AM	Bubbler valve closed
3/5/2011	11:00:34 AM	Main Vac valve opened
3/5/2011	11:00:34 AM	Bypass valve opened
3/5/2011	11:00:34 AM	Helium MFC set to  0.000000
3/5/2011	11:00:34 AM	H2 MFC set to  0.000000
3/5/2011	11:00:34 AM	BCl3 MFC set to  0.000000
3/5/2011	11:00:34 AM	PHl3 MFC set to  0.000000
3/5/2011	11:00:34 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:00:34 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:00:34 AM	Tube furnace set to 0
3/5/2011	11:00:34 AM	Run finished at 11:00 AM
3/5/2011	11:00:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2011	11:02:11 AM	Bypass valve closed
3/5/2011	11:02:12 AM	Main Vac valve closed
3/5/2011	11:04:04 AM	Bypass valve opened
3/5/2011	11:04:05 AM	Main Vac valve opened
3/5/2011	11:05:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2011	11:05:31 AM	Recipe started at 11:05 AM
3/5/2011	11:05:31 AM	H2 valve closed
3/5/2011	11:05:31 AM	BCl3 valve closed
3/5/2011	11:05:31 AM	PH3 valve closed
3/5/2011	11:05:31 AM	SiCl4 pre valve closed
3/5/2011	11:05:31 AM	SiCl4 post valve closed
3/5/2011	11:05:31 AM	Main Vac valve closed
3/5/2011	11:05:31 AM	Bypass valve closed
3/5/2011	11:05:31 AM	Bubbler valve closed
3/5/2011	11:05:31 AM	Helium valve opened
3/5/2011	11:05:31 AM	Helium MFC set to  500.000000
3/5/2011	11:05:31 AM	H2 MFC set to  0.000000
3/5/2011	11:05:31 AM	BCl3 MFC set to  0.000000
3/5/2011	11:05:31 AM	PHl3 MFC set to  0.000000
3/5/2011	11:05:31 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:05:31 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:05:31 AM	Tube furnace set to 0
3/5/2011	11:06:51 AM	Helium valve closed
3/5/2011	11:06:51 AM	H2 valve closed
3/5/2011	11:06:51 AM	BCl3 valve closed
3/5/2011	11:06:51 AM	PH3 valve closed
3/5/2011	11:06:51 AM	SiCl4 pre valve closed
3/5/2011	11:06:51 AM	SiCl4 post valve closed
3/5/2011	11:06:51 AM	Main Vac valve closed
3/5/2011	11:06:51 AM	Bypass valve closed
3/5/2011	11:06:51 AM	Bubbler valve closed
3/5/2011	11:06:51 AM	Helium MFC set to  0.000000
3/5/2011	11:06:51 AM	H2 MFC set to  0.000000
3/5/2011	11:06:51 AM	BCl3 MFC set to  0.000000
3/5/2011	11:06:51 AM	PHl3 MFC set to  0.000000
3/5/2011	11:06:51 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:06:51 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:06:51 AM	Tube furnace set to 0
3/5/2011	11:06:51 AM	Run finished at 11:06 AM
3/5/2011	11:06:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2011	11:11:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2011	11:11:24 AM	Recipe started at 11:11 AM
3/5/2011	11:11:24 AM	Helium valve closed
3/5/2011	11:11:24 AM	H2 valve closed
3/5/2011	11:11:24 AM	BCl3 valve closed
3/5/2011	11:11:24 AM	PH3 valve closed
3/5/2011	11:11:24 AM	SiCl4 pre valve closed
3/5/2011	11:11:24 AM	SiCl4 post valve closed
3/5/2011	11:11:24 AM	Main Vac valve closed
3/5/2011	11:11:24 AM	Bubbler valve closed
3/5/2011	11:11:24 AM	Bypass valve opened
3/5/2011	11:11:24 AM	Helium MFC set to  0.000000
3/5/2011	11:11:24 AM	H2 MFC set to  0.000000
3/5/2011	11:11:24 AM	BCl3 MFC set to  0.000000
3/5/2011	11:11:24 AM	PHl3 MFC set to  0.000000
3/5/2011	11:11:24 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:11:24 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:11:24 AM	Tube furnace set to 0
3/5/2011	11:11:55 AM	Helium valve closed
3/5/2011	11:11:55 AM	H2 valve closed
3/5/2011	11:11:55 AM	BCl3 valve closed
3/5/2011	11:11:55 AM	PH3 valve closed
3/5/2011	11:11:55 AM	SiCl4 pre valve closed
3/5/2011	11:11:55 AM	SiCl4 post valve closed
3/5/2011	11:11:55 AM	Bubbler valve closed
3/5/2011	11:11:55 AM	Main Vac valve opened
3/5/2011	11:11:55 AM	Bypass valve opened
3/5/2011	11:11:55 AM	Helium MFC set to  0.000000
3/5/2011	11:11:55 AM	H2 MFC set to  0.000000
3/5/2011	11:11:55 AM	BCl3 MFC set to  0.000000
3/5/2011	11:11:55 AM	PHl3 MFC set to  0.000000
3/5/2011	11:11:55 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:11:55 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:11:55 AM	Tube furnace set to 0
3/5/2011	11:11:56 AM	Run finished at 11:11 AM
3/5/2011	11:11:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2011	11:13:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2011	11:13:50 AM	Recipe started at 11:13 AM
3/5/2011	11:13:50 AM	H2 valve closed
3/5/2011	11:13:50 AM	BCl3 valve closed
3/5/2011	11:13:50 AM	PH3 valve closed
3/5/2011	11:13:50 AM	SiCl4 pre valve closed
3/5/2011	11:13:50 AM	SiCl4 post valve closed
3/5/2011	11:13:50 AM	Main Vac valve closed
3/5/2011	11:13:50 AM	Bypass valve closed
3/5/2011	11:13:50 AM	Bubbler valve closed
3/5/2011	11:13:50 AM	Helium valve opened
3/5/2011	11:13:50 AM	Helium MFC set to  500.000000
3/5/2011	11:13:50 AM	H2 MFC set to  0.000000
3/5/2011	11:13:50 AM	BCl3 MFC set to  0.000000
3/5/2011	11:13:50 AM	PHl3 MFC set to  0.000000
3/5/2011	11:13:50 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:13:50 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:13:50 AM	Tube furnace set to 0
3/5/2011	11:15:11 AM	Helium valve closed
3/5/2011	11:15:11 AM	H2 valve closed
3/5/2011	11:15:11 AM	BCl3 valve closed
3/5/2011	11:15:11 AM	PH3 valve closed
3/5/2011	11:15:11 AM	SiCl4 pre valve closed
3/5/2011	11:15:11 AM	SiCl4 post valve closed
3/5/2011	11:15:11 AM	Main Vac valve closed
3/5/2011	11:15:11 AM	Bypass valve closed
3/5/2011	11:15:11 AM	Bubbler valve closed
3/5/2011	11:15:11 AM	Helium MFC set to  0.000000
3/5/2011	11:15:11 AM	H2 MFC set to  0.000000
3/5/2011	11:15:11 AM	BCl3 MFC set to  0.000000
3/5/2011	11:15:11 AM	PHl3 MFC set to  0.000000
3/5/2011	11:15:11 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:15:11 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:15:11 AM	Tube furnace set to 0
3/5/2011	11:15:12 AM	Run finished at 11:15 AM
3/5/2011	11:15:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2011	11:16:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2011	11:16:59 AM	Recipe started at 11:16 AM
3/5/2011	11:16:59 AM	Helium valve closed
3/5/2011	11:16:59 AM	H2 valve closed
3/5/2011	11:16:59 AM	BCl3 valve closed
3/5/2011	11:16:59 AM	PH3 valve closed
3/5/2011	11:16:59 AM	SiCl4 pre valve closed
3/5/2011	11:16:59 AM	SiCl4 post valve closed
3/5/2011	11:16:59 AM	Main Vac valve closed
3/5/2011	11:16:59 AM	Bubbler valve closed
3/5/2011	11:16:59 AM	Bypass valve opened
3/5/2011	11:16:59 AM	Helium MFC set to  0.000000
3/5/2011	11:16:59 AM	H2 MFC set to  0.000000
3/5/2011	11:16:59 AM	BCl3 MFC set to  0.000000
3/5/2011	11:16:59 AM	PHl3 MFC set to  0.000000
3/5/2011	11:16:59 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:16:59 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:16:59 AM	Tube furnace set to 0
3/5/2011	11:17:30 AM	Helium valve closed
3/5/2011	11:17:30 AM	H2 valve closed
3/5/2011	11:17:30 AM	BCl3 valve closed
3/5/2011	11:17:30 AM	PH3 valve closed
3/5/2011	11:17:30 AM	SiCl4 pre valve closed
3/5/2011	11:17:30 AM	SiCl4 post valve closed
3/5/2011	11:17:30 AM	Bubbler valve closed
3/5/2011	11:17:30 AM	Main Vac valve opened
3/5/2011	11:17:30 AM	Bypass valve opened
3/5/2011	11:17:30 AM	Helium MFC set to  0.000000
3/5/2011	11:17:30 AM	H2 MFC set to  0.000000
3/5/2011	11:17:30 AM	BCl3 MFC set to  0.000000
3/5/2011	11:17:30 AM	PHl3 MFC set to  0.000000
3/5/2011	11:17:30 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:17:30 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:17:30 AM	Tube furnace set to 0
3/5/2011	11:17:31 AM	Run finished at 11:17 AM
3/5/2011	11:17:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2011	11:17:38 AM	Helium MFC set to  15.000000
3/5/2011	11:17:38 AM	Helium valve opened
3/5/2011	11:35:17 AM	Helium valve closed
3/5/2011	11:36:00 AM	Helium MFC set to  50.000000
3/5/2011	11:36:01 AM	Helium valve opened
3/5/2011	11:36:43 AM	Helium valve closed
3/5/2011	11:40:10 AM	Recipe started at 11:40 AM
3/5/2011	11:40:10 AM	Helium valve closed
3/5/2011	11:40:10 AM	BCl3 valve closed
3/5/2011	11:40:10 AM	PH3 valve closed
3/5/2011	11:40:10 AM	SiCl4 pre valve closed
3/5/2011	11:40:10 AM	SiCl4 post valve closed
3/5/2011	11:40:10 AM	Main Vac valve closed
3/5/2011	11:40:10 AM	Bypass valve closed
3/5/2011	11:40:10 AM	Bubbler valve closed
3/5/2011	11:40:10 AM	H2 valve opened
3/5/2011	11:40:10 AM	Helium MFC set to  0.000000
3/5/2011	11:40:10 AM	H2 MFC set to  500.000000
3/5/2011	11:40:10 AM	BCl3 MFC set to  0.000000
3/5/2011	11:40:10 AM	PHl3 MFC set to  0.000000
3/5/2011	11:40:10 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:40:10 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:40:10 AM	Tube furnace set to 0
3/5/2011	11:41:33 AM	Helium valve closed
3/5/2011	11:41:33 AM	BCl3 valve closed
3/5/2011	11:41:33 AM	PH3 valve closed
3/5/2011	11:41:33 AM	SiCl4 pre valve closed
3/5/2011	11:41:33 AM	SiCl4 post valve closed
3/5/2011	11:41:33 AM	Main Vac valve closed
3/5/2011	11:41:33 AM	Bypass valve closed
3/5/2011	11:41:33 AM	H2 valve opened
3/5/2011	11:41:33 AM	Bubbler valve opened
3/5/2011	11:41:33 AM	Helium MFC set to  0.000000
3/5/2011	11:41:33 AM	H2 MFC set to  500.000000
3/5/2011	11:41:33 AM	BCl3 MFC set to  0.000000
3/5/2011	11:41:33 AM	PHl3 MFC set to  0.000000
3/5/2011	11:41:33 AM	SiCl4 MFC set to  0.000000
3/5/2011	11:41:33 AM	Bypass solenoid MFC set to  0.000000
3/5/2011	11:41:34 AM	Tube furnace set to 1000
3/5/2011	12:01:33 PM	Helium valve closed
3/5/2011	12:01:33 PM	BCl3 valve closed
3/5/2011	12:01:33 PM	PH3 valve closed
3/5/2011	12:01:33 PM	Main Vac valve closed
3/5/2011	12:01:33 PM	Bypass valve closed
3/5/2011	12:01:33 PM	H2 valve opened
3/5/2011	12:01:33 PM	SiCl4 pre valve opened
3/5/2011	12:01:33 PM	SiCl4 post valve opened
3/5/2011	12:01:33 PM	Bubbler valve opened
3/5/2011	12:01:33 PM	Helium MFC set to  0.000000
3/5/2011	12:01:33 PM	H2 MFC set to  500.000000
3/5/2011	12:01:33 PM	BCl3 MFC set to  0.000000
3/5/2011	12:01:33 PM	PHl3 MFC set to  0.000000
3/5/2011	12:01:33 PM	SiCl4 MFC set to  50.000000
3/5/2011	12:01:33 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	12:01:34 PM	Tube furnace set to 1000
3/5/2011	12:21:34 PM	H2 valve closed
3/5/2011	12:21:34 PM	BCl3 valve closed
3/5/2011	12:21:34 PM	PH3 valve closed
3/5/2011	12:21:34 PM	SiCl4 pre valve closed
3/5/2011	12:21:34 PM	SiCl4 post valve closed
3/5/2011	12:21:34 PM	Main Vac valve closed
3/5/2011	12:21:34 PM	Bypass valve closed
3/5/2011	12:21:34 PM	Helium valve opened
3/5/2011	12:21:34 PM	Bubbler valve opened
3/5/2011	12:21:34 PM	Helium MFC set to  500.000000
3/5/2011	12:21:34 PM	H2 MFC set to  0.000000
3/5/2011	12:21:34 PM	BCl3 MFC set to  0.000000
3/5/2011	12:21:34 PM	PHl3 MFC set to  0.000000
3/5/2011	12:21:34 PM	SiCl4 MFC set to  0.000000
3/5/2011	12:21:34 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	12:21:34 PM	Tube furnace set to 0
3/5/2011	1:11:34 PM	H2 valve closed
3/5/2011	1:11:34 PM	BCl3 valve closed
3/5/2011	1:11:34 PM	PH3 valve closed
3/5/2011	1:11:34 PM	SiCl4 pre valve closed
3/5/2011	1:11:34 PM	SiCl4 post valve closed
3/5/2011	1:11:34 PM	Main Vac valve closed
3/5/2011	1:11:34 PM	Bypass valve closed
3/5/2011	1:11:34 PM	Helium valve opened
3/5/2011	1:11:34 PM	Bubbler valve opened
3/5/2011	1:11:34 PM	Helium MFC set to  500.000000
3/5/2011	1:11:34 PM	H2 MFC set to  0.000000
3/5/2011	1:11:34 PM	BCl3 MFC set to  0.000000
3/5/2011	1:11:34 PM	PHl3 MFC set to  0.000000
3/5/2011	1:11:34 PM	SiCl4 MFC set to  0.000000
3/5/2011	1:11:34 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	1:11:34 PM	Tube furnace set to 0
3/5/2011	1:44:54 PM	Helium valve closed
3/5/2011	1:44:54 PM	H2 valve closed
3/5/2011	1:44:54 PM	BCl3 valve closed
3/5/2011	1:44:54 PM	PH3 valve closed
3/5/2011	1:44:54 PM	SiCl4 pre valve closed
3/5/2011	1:44:54 PM	SiCl4 post valve closed
3/5/2011	1:44:54 PM	Main Vac valve closed
3/5/2011	1:44:54 PM	Bypass valve closed
3/5/2011	1:44:54 PM	Bubbler valve closed
3/5/2011	1:44:54 PM	Helium MFC set to  0.000000
3/5/2011	1:44:54 PM	H2 MFC set to  0.000000
3/5/2011	1:44:54 PM	BCl3 MFC set to  0.000000
3/5/2011	1:44:54 PM	PHl3 MFC set to  0.000000
3/5/2011	1:44:54 PM	SiCl4 MFC set to  0.000000
3/5/2011	1:44:54 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	1:44:54 PM	Tube furnace set to 0
3/5/2011	1:44:55 PM	Run finished at 1:44 PM
3/5/2011	1:55:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2011	1:55:33 PM	Recipe started at 1:55 PM
3/5/2011	1:55:33 PM	Helium valve closed
3/5/2011	1:55:33 PM	H2 valve closed
3/5/2011	1:55:33 PM	BCl3 valve closed
3/5/2011	1:55:33 PM	PH3 valve closed
3/5/2011	1:55:33 PM	SiCl4 pre valve closed
3/5/2011	1:55:33 PM	SiCl4 post valve closed
3/5/2011	1:55:33 PM	Main Vac valve closed
3/5/2011	1:55:33 PM	Bubbler valve closed
3/5/2011	1:55:33 PM	Bypass valve opened
3/5/2011	1:55:33 PM	Helium MFC set to  0.000000
3/5/2011	1:55:33 PM	H2 MFC set to  0.000000
3/5/2011	1:55:33 PM	BCl3 MFC set to  0.000000
3/5/2011	1:55:33 PM	PHl3 MFC set to  0.000000
3/5/2011	1:55:33 PM	SiCl4 MFC set to  0.000000
3/5/2011	1:55:33 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	1:55:33 PM	Tube furnace set to 0
3/5/2011	1:56:05 PM	Helium valve closed
3/5/2011	1:56:05 PM	H2 valve closed
3/5/2011	1:56:05 PM	BCl3 valve closed
3/5/2011	1:56:05 PM	PH3 valve closed
3/5/2011	1:56:05 PM	SiCl4 pre valve closed
3/5/2011	1:56:05 PM	SiCl4 post valve closed
3/5/2011	1:56:05 PM	Bubbler valve closed
3/5/2011	1:56:05 PM	Main Vac valve opened
3/5/2011	1:56:05 PM	Bypass valve opened
3/5/2011	1:56:05 PM	Helium MFC set to  0.000000
3/5/2011	1:56:05 PM	H2 MFC set to  0.000000
3/5/2011	1:56:05 PM	BCl3 MFC set to  0.000000
3/5/2011	1:56:05 PM	PHl3 MFC set to  0.000000
3/5/2011	1:56:05 PM	SiCl4 MFC set to  0.000000
3/5/2011	1:56:05 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	1:56:05 PM	Tube furnace set to 0
3/5/2011	1:56:06 PM	Run finished at 1:56 PM
3/5/2011	1:56:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2011	1:56:27 PM	Helium MFC set to  15.000000
3/5/2011	1:56:28 PM	Helium valve opened
3/5/2011	2:24:46 PM	Helium valve closed
3/5/2011	2:24:50 PM	Helium MFC set to  50.000000
3/5/2011	2:24:51 PM	Helium valve opened
3/5/2011	2:25:03 PM	Helium valve closed
3/5/2011	2:25:51 PM	Recipe started at 2:25 PM
3/5/2011	2:25:51 PM	Helium valve closed
3/5/2011	2:25:51 PM	BCl3 valve closed
3/5/2011	2:25:51 PM	PH3 valve closed
3/5/2011	2:25:51 PM	SiCl4 pre valve closed
3/5/2011	2:25:51 PM	SiCl4 post valve closed
3/5/2011	2:25:51 PM	Main Vac valve closed
3/5/2011	2:25:51 PM	Bypass valve closed
3/5/2011	2:25:51 PM	Bubbler valve closed
3/5/2011	2:25:51 PM	H2 valve opened
3/5/2011	2:25:51 PM	Helium MFC set to  0.000000
3/5/2011	2:25:51 PM	H2 MFC set to  500.000000
3/5/2011	2:25:51 PM	BCl3 MFC set to  0.000000
3/5/2011	2:25:51 PM	PHl3 MFC set to  0.000000
3/5/2011	2:25:51 PM	SiCl4 MFC set to  0.000000
3/5/2011	2:25:51 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	2:25:51 PM	Tube furnace set to 0
3/5/2011	2:27:14 PM	Helium valve closed
3/5/2011	2:27:14 PM	BCl3 valve closed
3/5/2011	2:27:14 PM	PH3 valve closed
3/5/2011	2:27:14 PM	SiCl4 pre valve closed
3/5/2011	2:27:14 PM	SiCl4 post valve closed
3/5/2011	2:27:14 PM	Main Vac valve closed
3/5/2011	2:27:14 PM	Bypass valve closed
3/5/2011	2:27:14 PM	H2 valve opened
3/5/2011	2:27:14 PM	Bubbler valve opened
3/5/2011	2:27:14 PM	Helium MFC set to  0.000000
3/5/2011	2:27:14 PM	H2 MFC set to  500.000000
3/5/2011	2:27:14 PM	BCl3 MFC set to  0.000000
3/5/2011	2:27:14 PM	PHl3 MFC set to  0.000000
3/5/2011	2:27:14 PM	SiCl4 MFC set to  0.000000
3/5/2011	2:27:14 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	2:27:14 PM	Tube furnace set to 1000
3/5/2011	2:47:14 PM	Helium valve closed
3/5/2011	2:47:14 PM	BCl3 valve closed
3/5/2011	2:47:14 PM	PH3 valve closed
3/5/2011	2:47:14 PM	Main Vac valve closed
3/5/2011	2:47:14 PM	Bypass valve closed
3/5/2011	2:47:14 PM	H2 valve opened
3/5/2011	2:47:14 PM	SiCl4 pre valve opened
3/5/2011	2:47:14 PM	SiCl4 post valve opened
3/5/2011	2:47:14 PM	Bubbler valve opened
3/5/2011	2:47:14 PM	Helium MFC set to  0.000000
3/5/2011	2:47:14 PM	H2 MFC set to  500.000000
3/5/2011	2:47:14 PM	BCl3 MFC set to  0.000000
3/5/2011	2:47:14 PM	PHl3 MFC set to  0.000000
3/5/2011	2:47:14 PM	SiCl4 MFC set to  50.000000
3/5/2011	2:47:14 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	2:47:15 PM	Tube furnace set to 1000
3/5/2011	3:07:15 PM	H2 valve closed
3/5/2011	3:07:15 PM	BCl3 valve closed
3/5/2011	3:07:15 PM	PH3 valve closed
3/5/2011	3:07:15 PM	SiCl4 pre valve closed
3/5/2011	3:07:15 PM	SiCl4 post valve closed
3/5/2011	3:07:15 PM	Main Vac valve closed
3/5/2011	3:07:15 PM	Bypass valve closed
3/5/2011	3:07:15 PM	Helium valve opened
3/5/2011	3:07:15 PM	Bubbler valve opened
3/5/2011	3:07:15 PM	Helium MFC set to  500.000000
3/5/2011	3:07:15 PM	H2 MFC set to  0.000000
3/5/2011	3:07:15 PM	BCl3 MFC set to  0.000000
3/5/2011	3:07:15 PM	PHl3 MFC set to  0.000000
3/5/2011	3:07:15 PM	SiCl4 MFC set to  0.000000
3/5/2011	3:07:15 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	3:07:15 PM	Tube furnace set to 0
3/5/2011	3:49:27 PM	H2 valve closed
3/5/2011	3:49:27 PM	BCl3 valve closed
3/5/2011	3:49:27 PM	PH3 valve closed
3/5/2011	3:49:27 PM	SiCl4 pre valve closed
3/5/2011	3:49:27 PM	SiCl4 post valve closed
3/5/2011	3:49:27 PM	Main Vac valve closed
3/5/2011	3:49:27 PM	Bypass valve closed
3/5/2011	3:49:27 PM	Helium valve opened
3/5/2011	3:49:27 PM	Bubbler valve opened
3/5/2011	3:49:27 PM	Helium MFC set to  500.000000
3/5/2011	3:49:27 PM	H2 MFC set to  0.000000
3/5/2011	3:49:27 PM	BCl3 MFC set to  0.000000
3/5/2011	3:49:27 PM	PHl3 MFC set to  0.000000
3/5/2011	3:49:27 PM	SiCl4 MFC set to  0.000000
3/5/2011	3:49:27 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	3:49:27 PM	Tube furnace set to 0
3/5/2011	3:49:29 PM	Helium valve closed
3/5/2011	3:49:29 PM	H2 valve closed
3/5/2011	3:49:29 PM	BCl3 valve closed
3/5/2011	3:49:29 PM	PH3 valve closed
3/5/2011	3:49:29 PM	SiCl4 pre valve closed
3/5/2011	3:49:29 PM	SiCl4 post valve closed
3/5/2011	3:49:29 PM	Main Vac valve closed
3/5/2011	3:49:29 PM	Bypass valve closed
3/5/2011	3:49:29 PM	Bubbler valve closed
3/5/2011	3:49:29 PM	Helium MFC set to  0.000000
3/5/2011	3:49:29 PM	H2 MFC set to  0.000000
3/5/2011	3:49:29 PM	BCl3 MFC set to  0.000000
3/5/2011	3:49:29 PM	PHl3 MFC set to  0.000000
3/5/2011	3:49:29 PM	SiCl4 MFC set to  0.000000
3/5/2011	3:49:29 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	3:49:29 PM	Tube furnace set to 0
3/5/2011	3:49:29 PM	Run finished at 3:49 PM
3/5/2011	3:56:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2011	3:56:36 PM	Recipe started at 3:56 PM
3/5/2011	3:56:36 PM	Helium valve closed
3/5/2011	3:56:36 PM	H2 valve closed
3/5/2011	3:56:36 PM	BCl3 valve closed
3/5/2011	3:56:36 PM	PH3 valve closed
3/5/2011	3:56:36 PM	SiCl4 pre valve closed
3/5/2011	3:56:36 PM	SiCl4 post valve closed
3/5/2011	3:56:36 PM	Main Vac valve closed
3/5/2011	3:56:36 PM	Bubbler valve closed
3/5/2011	3:56:36 PM	Bypass valve opened
3/5/2011	3:56:36 PM	Helium MFC set to  0.000000
3/5/2011	3:56:36 PM	H2 MFC set to  0.000000
3/5/2011	3:56:36 PM	BCl3 MFC set to  0.000000
3/5/2011	3:56:36 PM	PHl3 MFC set to  0.000000
3/5/2011	3:56:36 PM	SiCl4 MFC set to  0.000000
3/5/2011	3:56:36 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	3:56:36 PM	Tube furnace set to 0
3/5/2011	3:57:09 PM	Helium valve closed
3/5/2011	3:57:09 PM	H2 valve closed
3/5/2011	3:57:09 PM	BCl3 valve closed
3/5/2011	3:57:09 PM	PH3 valve closed
3/5/2011	3:57:09 PM	SiCl4 pre valve closed
3/5/2011	3:57:09 PM	SiCl4 post valve closed
3/5/2011	3:57:09 PM	Bubbler valve closed
3/5/2011	3:57:09 PM	Main Vac valve opened
3/5/2011	3:57:09 PM	Bypass valve opened
3/5/2011	3:57:09 PM	Helium MFC set to  0.000000
3/5/2011	3:57:09 PM	H2 MFC set to  0.000000
3/5/2011	3:57:09 PM	BCl3 MFC set to  0.000000
3/5/2011	3:57:09 PM	PHl3 MFC set to  0.000000
3/5/2011	3:57:09 PM	SiCl4 MFC set to  0.000000
3/5/2011	3:57:09 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	3:57:09 PM	Tube furnace set to 0
3/5/2011	3:57:09 PM	Run finished at 3:57 PM
3/5/2011	3:57:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2011	3:57:48 PM	Helium MFC set to  20.000000
3/5/2011	3:57:49 PM	Helium valve opened
3/5/2011	4:40:34 PM	Helium valve closed
3/5/2011	4:42:34 PM	Recipe started at 4:42 PM
3/5/2011	4:42:34 PM	Helium valve closed
3/5/2011	4:42:34 PM	BCl3 valve closed
3/5/2011	4:42:34 PM	PH3 valve closed
3/5/2011	4:42:34 PM	SiCl4 pre valve closed
3/5/2011	4:42:34 PM	SiCl4 post valve closed
3/5/2011	4:42:34 PM	Main Vac valve closed
3/5/2011	4:42:34 PM	Bypass valve closed
3/5/2011	4:42:34 PM	Bubbler valve closed
3/5/2011	4:42:34 PM	H2 valve opened
3/5/2011	4:42:34 PM	Helium MFC set to  0.000000
3/5/2011	4:42:34 PM	H2 MFC set to  500.000000
3/5/2011	4:42:34 PM	BCl3 MFC set to  0.000000
3/5/2011	4:42:34 PM	PHl3 MFC set to  0.000000
3/5/2011	4:42:34 PM	SiCl4 MFC set to  0.000000
3/5/2011	4:42:34 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	4:42:34 PM	Tube furnace set to 0
3/5/2011	4:43:57 PM	Helium valve closed
3/5/2011	4:43:57 PM	BCl3 valve closed
3/5/2011	4:43:57 PM	PH3 valve closed
3/5/2011	4:43:57 PM	SiCl4 pre valve closed
3/5/2011	4:43:57 PM	SiCl4 post valve closed
3/5/2011	4:43:57 PM	Main Vac valve closed
3/5/2011	4:43:57 PM	Bypass valve closed
3/5/2011	4:43:57 PM	H2 valve opened
3/5/2011	4:43:57 PM	Bubbler valve opened
3/5/2011	4:43:57 PM	Helium MFC set to  0.000000
3/5/2011	4:43:57 PM	H2 MFC set to  500.000000
3/5/2011	4:43:57 PM	BCl3 MFC set to  0.000000
3/5/2011	4:43:57 PM	PHl3 MFC set to  0.000000
3/5/2011	4:43:57 PM	SiCl4 MFC set to  0.000000
3/5/2011	4:43:57 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	4:43:58 PM	Tube furnace set to 1000
3/5/2011	5:03:58 PM	Helium valve closed
3/5/2011	5:03:58 PM	BCl3 valve closed
3/5/2011	5:03:58 PM	PH3 valve closed
3/5/2011	5:03:58 PM	Main Vac valve closed
3/5/2011	5:03:58 PM	Bypass valve closed
3/5/2011	5:03:58 PM	H2 valve opened
3/5/2011	5:03:58 PM	SiCl4 pre valve opened
3/5/2011	5:03:58 PM	SiCl4 post valve opened
3/5/2011	5:03:58 PM	Bubbler valve opened
3/5/2011	5:03:58 PM	Helium MFC set to  0.000000
3/5/2011	5:03:58 PM	H2 MFC set to  500.000000
3/5/2011	5:03:58 PM	BCl3 MFC set to  0.000000
3/5/2011	5:03:58 PM	PHl3 MFC set to  0.000000
3/5/2011	5:03:58 PM	SiCl4 MFC set to  50.000000
3/5/2011	5:03:58 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	5:03:58 PM	Tube furnace set to 1000
3/5/2011	5:23:58 PM	H2 valve closed
3/5/2011	5:23:58 PM	BCl3 valve closed
3/5/2011	5:23:58 PM	PH3 valve closed
3/5/2011	5:23:58 PM	SiCl4 pre valve closed
3/5/2011	5:23:58 PM	SiCl4 post valve closed
3/5/2011	5:23:58 PM	Main Vac valve closed
3/5/2011	5:23:58 PM	Bypass valve closed
3/5/2011	5:23:58 PM	Helium valve opened
3/5/2011	5:23:58 PM	Bubbler valve opened
3/5/2011	5:23:58 PM	Helium MFC set to  500.000000
3/5/2011	5:23:58 PM	H2 MFC set to  0.000000
3/5/2011	5:23:58 PM	BCl3 MFC set to  0.000000
3/5/2011	5:23:58 PM	PHl3 MFC set to  0.000000
3/5/2011	5:23:58 PM	SiCl4 MFC set to  0.000000
3/5/2011	5:23:58 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	5:23:58 PM	Tube furnace set to 0
3/5/2011	6:01:22 PM	H2 valve closed
3/5/2011	6:01:22 PM	BCl3 valve closed
3/5/2011	6:01:22 PM	PH3 valve closed
3/5/2011	6:01:22 PM	SiCl4 pre valve closed
3/5/2011	6:01:22 PM	SiCl4 post valve closed
3/5/2011	6:01:22 PM	Main Vac valve closed
3/5/2011	6:01:22 PM	Bypass valve closed
3/5/2011	6:01:22 PM	Helium valve opened
3/5/2011	6:01:22 PM	Bubbler valve opened
3/5/2011	6:01:22 PM	Helium MFC set to  500.000000
3/5/2011	6:01:22 PM	H2 MFC set to  0.000000
3/5/2011	6:01:22 PM	BCl3 MFC set to  0.000000
3/5/2011	6:01:22 PM	PHl3 MFC set to  0.000000
3/5/2011	6:01:22 PM	SiCl4 MFC set to  0.000000
3/5/2011	6:01:22 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	6:01:23 PM	Tube furnace set to 0
3/5/2011	6:01:23 PM	Helium valve closed
3/5/2011	6:01:23 PM	H2 valve closed
3/5/2011	6:01:23 PM	BCl3 valve closed
3/5/2011	6:01:23 PM	PH3 valve closed
3/5/2011	6:01:23 PM	SiCl4 pre valve closed
3/5/2011	6:01:23 PM	SiCl4 post valve closed
3/5/2011	6:01:23 PM	Main Vac valve closed
3/5/2011	6:01:23 PM	Bypass valve closed
3/5/2011	6:01:23 PM	Bubbler valve closed
3/5/2011	6:01:23 PM	Helium MFC set to  0.000000
3/5/2011	6:01:23 PM	H2 MFC set to  0.000000
3/5/2011	6:01:23 PM	BCl3 MFC set to  0.000000
3/5/2011	6:01:23 PM	PHl3 MFC set to  0.000000
3/5/2011	6:01:23 PM	SiCl4 MFC set to  0.000000
3/5/2011	6:01:23 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	6:01:23 PM	Tube furnace set to 0
3/5/2011	6:01:23 PM	Run finished at 6:01 PM
3/5/2011	6:03:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2011	6:03:09 PM	Recipe started at 6:03 PM
3/5/2011	6:03:09 PM	Helium valve closed
3/5/2011	6:03:09 PM	H2 valve closed
3/5/2011	6:03:09 PM	BCl3 valve closed
3/5/2011	6:03:09 PM	PH3 valve closed
3/5/2011	6:03:09 PM	SiCl4 pre valve closed
3/5/2011	6:03:09 PM	SiCl4 post valve closed
3/5/2011	6:03:09 PM	Main Vac valve closed
3/5/2011	6:03:09 PM	Bubbler valve closed
3/5/2011	6:03:09 PM	Bypass valve opened
3/5/2011	6:03:09 PM	Helium MFC set to  0.000000
3/5/2011	6:03:09 PM	H2 MFC set to  0.000000
3/5/2011	6:03:09 PM	BCl3 MFC set to  0.000000
3/5/2011	6:03:09 PM	PHl3 MFC set to  0.000000
3/5/2011	6:03:09 PM	SiCl4 MFC set to  0.000000
3/5/2011	6:03:09 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	6:03:09 PM	Tube furnace set to 0
3/5/2011	6:03:40 PM	Helium valve closed
3/5/2011	6:03:40 PM	H2 valve closed
3/5/2011	6:03:40 PM	BCl3 valve closed
3/5/2011	6:03:40 PM	PH3 valve closed
3/5/2011	6:03:40 PM	SiCl4 pre valve closed
3/5/2011	6:03:40 PM	SiCl4 post valve closed
3/5/2011	6:03:40 PM	Bubbler valve closed
3/5/2011	6:03:40 PM	Main Vac valve opened
3/5/2011	6:03:40 PM	Bypass valve opened
3/5/2011	6:03:40 PM	Helium MFC set to  0.000000
3/5/2011	6:03:40 PM	H2 MFC set to  0.000000
3/5/2011	6:03:40 PM	BCl3 MFC set to  0.000000
3/5/2011	6:03:40 PM	PHl3 MFC set to  0.000000
3/5/2011	6:03:40 PM	SiCl4 MFC set to  0.000000
3/5/2011	6:03:40 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	6:03:41 PM	Tube furnace set to 0
3/5/2011	6:03:41 PM	Run finished at 6:03 PM
3/5/2011	6:03:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2011	6:04:19 PM	Helium MFC set to  50.000000
3/5/2011	6:04:19 PM	Helium valve opened
3/5/2011	6:10:43 PM	Helium valve closed
3/5/2011	6:11:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/5/2011	6:11:23 PM	Recipe started at 6:11 PM
3/5/2011	6:11:23 PM	Helium valve closed
3/5/2011	6:11:23 PM	H2 valve closed
3/5/2011	6:11:23 PM	BCl3 valve closed
3/5/2011	6:11:23 PM	PH3 valve closed
3/5/2011	6:11:23 PM	SiCl4 pre valve closed
3/5/2011	6:11:23 PM	SiCl4 post valve closed
3/5/2011	6:11:23 PM	Main Vac valve closed
3/5/2011	6:11:23 PM	Bypass valve closed
3/5/2011	6:11:23 PM	Bubbler valve closed
3/5/2011	6:11:23 PM	Helium MFC set to  0.000000
3/5/2011	6:11:23 PM	H2 MFC set to  0.000000
3/5/2011	6:11:23 PM	BCl3 MFC set to  0.000000
3/5/2011	6:11:23 PM	PHl3 MFC set to  0.000000
3/5/2011	6:11:23 PM	SiCl4 MFC set to  0.000000
3/5/2011	6:11:23 PM	Bypass solenoid MFC set to  0.000000
3/5/2011	6:11:23 PM	Tube furnace set to 0
3/5/2011	6:11:23 PM	Run finished at 6:11 PM
3/5/2011	6:11:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
